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Study of the Optical Methods of Formation of Multilevel Profile in the Thin Films of a Hybrid Photopolymer Material Based on Thiol-Siloxane and Acrylate Oligomers Научная публикация

Журнал Optoelectronics, Instrumentation and Data Processing
ISSN: 8756-6990 , E-ISSN: 1934-7944
Вых. Данные Год: 2017, Том: 53, Номер: 5, Страницы: 466-473 Страниц : 8 DOI: 10.3103/S8756699017050065
Ключевые слова hybrid photopolymer; thiol-siloxane-acrylate oligomers; laser writing; photolithography; multilevel diffractive structures; characteristic curve
Авторы Mironnikov N.G. 1,2 , Korolkov V.P. 1,2 , Derevyanko D.I. 3 , Shelkovnikov V.V. 3,4
Организации
1 (Данные Web of science) Russian Acad Sci, Inst Automat & Electrometry, Siberian Branch, Pr Acad Koptyuga 1, Novosibirsk 630090, Russia
2 (Данные Web of science) Novosibirsk State Univ, Ul Pirogova 2, Novosibirsk 630090, Russia
3 (Данные Web of science) Russian Acad Sci, NN Vorozhtsov Novosibirsk Inst Organ Chem, Siberian Branch, Pr Akad Lavrentyeva9, Novosibirsk 630090, Russia
4 (Данные Web of science) Novosibirsk State Tech Univ, Pr Karla Marksa 20, Novosibirsk 630073, Russia

Реферат: This paper describes a study of the optical methods for fabrication of multilevel profile in the layers of a Hybrimer-TATS hybrid photopolymer material based on thiol-siloxane and acrylate oligomers. Grayscale photolithography and direct laser writing are used to form multilevel structures 3.5 and 6 mu in height, respectively. The characteristic curves and photosensitivity of the material are determined. The film preparation and treatment processes are optimized, and it is determined that addition of the stages of pre- and post-exposure significantly affects the photosensitive properties of Hybrimer-TATS. The photopolymer is promising as a structural material for the formation of microstructured optical components.
Библиографическая ссылка: Mironnikov N.G. , Korolkov V.P. , Derevyanko D.I. , Shelkovnikov V.V.
Study of the Optical Methods of Formation of Multilevel Profile in the Thin Films of a Hybrid Photopolymer Material Based on Thiol-Siloxane and Acrylate Oligomers
Optoelectronics, Instrumentation and Data Processing. 2017. V.53. N5. P.466-473. DOI: 10.3103/S8756699017050065 WOS Scopus РИНЦ OpenAlex
Оригинальная: Миронников Н.Г. , Корольков В.П. , Деревянко Д.И. , Шелковников В.В.
Исследование оптических методов формирования многоуровневого микрорельефа в тонких плёнках гибридного фотополимерного материала на основе тиол-силоксановых и акрилатных олигомеров
Автометрия. 2017. Т.53. №5. С.57-65. DOI: 10.15372/AUT20170506 РИНЦ OpenAlex
Даты:
Опубликована в печати: 1 сент. 2017 г.
Опубликована online: 16 дек. 2017 г.
Идентификаторы БД:
Web of science: WOS:000418124100006
Scopus: 2-s2.0-85038122825
РИНЦ: 35476014
OpenAlex: W2771396988
Цитирование в БД:
БД Цитирований
Web of science 4
Scopus 4
РИНЦ 5
OpenAlex 5
Альметрики: