Study of the Optical Methods of Formation of Multilevel Profile in the Thin Films of a Hybrid Photopolymer Material Based on Thiol-Siloxane and Acrylate Oligomers

Study of the Optical Methods of Formation of Multilevel Profile in the Thin Films of a Hybrid Photopolymer Material Based on Thiol-Siloxane and Acrylate Oligomers Научная публикация

Журнал

Optoelectronics, Instrumentation and Data Processing
ISSN: 8756-6990 , E-ISSN: 1934-7944

Вых. Данные

Год: 2017, Том: 53, Номер: 5, Страницы: 466-473 Страниц : 8 DOI: 10.3103/S8756699017050065

Ключевые слова

hybrid photopolymer; thiol-siloxane-acrylate oligomers; laser writing; photolithography; multilevel diffractive structures; characteristic curve

Авторы

Mironnikov N.G. ^1,2 , Korolkov V.P. ^1,2 , Derevyanko D.I. ³ , Shelkovnikov V.V. ^3,4

Организации

1	(Данные Web of science) Russian Acad Sci, Inst Automat & Electrometry, Siberian Branch, Pr Acad Koptyuga 1, Novosibirsk 630090, Russia
2	(Данные Web of science) Novosibirsk State Univ, Ul Pirogova 2, Novosibirsk 630090, Russia
3	(Данные Web of science) Russian Acad Sci, NN Vorozhtsov Novosibirsk Inst Organ Chem, Siberian Branch, Pr Akad Lavrentyeva9, Novosibirsk 630090, Russia
4	(Данные Web of science) Novosibirsk State Tech Univ, Pr Karla Marksa 20, Novosibirsk 630073, Russia

This paper describes a study of the optical methods for fabrication of multilevel profile in the layers of a Hybrimer-TATS hybrid photopolymer material based on thiol-siloxane and acrylate oligomers. Grayscale photolithography and direct laser writing are used to form multilevel structures 3.5 and 6 mu in height, respectively. The characteristic curves and photosensitivity of the material are determined. The film preparation and treatment processes are optimized, and it is determined that addition of the stages of pre- and post-exposure significantly affects the photosensitive properties of Hybrimer-TATS. The photopolymer is promising as a structural material for the formation of microstructured optical components.

Mironnikov N.G. , Korolkov V.P. , Derevyanko D.I. , Shelkovnikov V.V.
Study of the Optical Methods of Formation of Multilevel Profile in the Thin Films of a Hybrid Photopolymer Material Based on Thiol-Siloxane and Acrylate Oligomers
Optoelectronics, Instrumentation and Data Processing. 2017. V.53. N5. P.466-473. DOI: 10.3103/S8756699017050065 WOS Scopus РИНЦ

Миронников Н.Г. , Корольков В.П. , Деревянко Д.И. , Шелковников В.В.
Исследование оптических методов формирования многоуровневого микрорельефа в тонких плёнках гибридного фотополимерного материала на основе тиол-силоксановых и акрилатных олигомеров
Автометрия. 2017. Т.53. №5. С.57-65. DOI: 10.15372/AUT20170506 РИНЦ

Опубликована в печати:	1 сент. 2017 г.
Опубликована online:	16 дек. 2017 г.

Web of science	WOS:000418124100006
Scopus	2-s2.0-85038122825
РИНЦ	35476014
OpenAlex	W2771396988