Fabrication of High-aspect-ratio Microstructures for LIGA-technology by Sinchrotron Radiation Polymerisation of Thetetraacrylate Monomer

Fabrication of High-aspect-ratio Microstructures for LIGA-technology by Sinchrotron Radiation Polymerisation of Thetetraacrylate Monomer Научная публикация

Журнал

Physics Procedia
ISSN: 1875-3884

Вых. Данные

Год: 2017, Том: 86, Страницы: 122-126 Страниц : 5 DOI: 10.1016/j.phpro.2017.01.032

Ключевые слова

LIGA-technology; polymerization; tetraacrylate monomer; x-ray lithography

Авторы

Derevyanko D.I. ¹ , Shelkovnikov V.V. ¹ , Orlova N.A. ¹ , Goldenberg B.G. ² , Lemzyakov A.G. ² , Korolkov V.P. ³

Организации

1	(Scopus) Novosibirsk Institute of Organic Chemistry SB RAS, pr. Lavrentieva 9, Novosibirsk, 630090, Russian Federation
2	(Scopus) Budker Institute of Nuclear Physics of SB RAS, pr. Lavrentieva 1DUMMY, Novosibirsk, 630090, Russian Federation
3	(Scopus) Institute of Automation and Electrometry SB RAS, Koptyuga avenue 1, Novosibirsk, 630090, Russian Federation

The high-aspect ratio microstructures were fabricated by action of synchrotron x-ray on the synthesized tetraacrylate monomer: 3-[4-({4-[2,3-bis(prop-2-enoyloxy)propoxy]phenyl}sulfanyl)phenoxy]-3-(prop-2-enoyloxy)propan-2-yl prop-2-enoate. The storage ring VEPP-3 (electron energy is 2 GeV) at the station «LIGA» of BINP SB RAS was used as the source of the synchrotron radiation. The dependence of the thickness of the x-ray polymerized samples vs. the absorbed dose was measured in the range 1-100 kJ/cm3. The possibility of use synthesized tetraacrylate monomer for the microstructures recording with aspect ratio 1:25 by the x-ray lithography metod was demonstrated. © 2017 The Authors.

Derevyanko D.I. , Shelkovnikov V.V. , Orlova N.A. , Goldenberg B.G. , Lemzyakov A.G. , Korolkov V.P.
Fabrication of High-aspect-ratio Microstructures for LIGA-technology by Sinchrotron Radiation Polymerisation of Thetetraacrylate Monomer

Physics Procedia. 2017. V.86. P.122-126. DOI: 10.1016/j.phpro.2017.01.032 Scopus РИНЦ

Полный текст от издателя

Scopus	2-s2.0-85017388413
РИНЦ	29484061
OpenAlex	W2590005121