Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films

Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films Научная публикация

Журнал

Polyhedron
ISSN: 0277-5387

Вых. Данные

Год: 2020, Том: 191, Номер статьи : 114806, Страниц : DOI: 10.1016/j.poly.2020.114806

Ключевые слова

Beta-diketonates; Composite films; Heterometallic complexes; MOCVD; Single source precursors; Volatile metalorganic complexes

Авторы

Krisyuk Vladislav V. ¹ , Ursym kyzy Samara ¹ , Rybalova Tatyana V. ^2,3 , Korolkov Ilya V. ^1,3 , Sysoev Sergey V. ¹ , Koretskaya Tatyana P. ¹ , Kuchumov Boris M. ¹ , Turgambaeva Asiya E. ¹

Организации

1	(Scopus) Nikolaev Institute of Inorganic Chemistry, SB RAS, Lavrentiev Ave. 3, Novosibirsk, 630090, Russian Federation
2	(Scopus) Vorozhtsov Novosibirsk Institute of Organic Chemistry SB RAS, Lavrentiev Ave. 9, Novosibirsk, 630090, Russian Federation
3	(Scopus) Novosibirsk State University, Pirogova str. 2, Novosibirsk, 630090, Russian Federation

A series of new trinuclear molecular complexes [PbL12{Co(hfa)2}2] (1), [PbL12{Ni(hfa)2}2] (2), [PbL22{Co(hfa)2}2] (3), [PbL22{Ni(hfa)2}2] (4), [PbL32{Co(hfa)2}2] (5), [PbL32{Ni(hfa)2}2] (6), where L = methoxy-substituted β-diketonate RCOCHCOC(CH3)2OCH3, L1: R = CH3, L2: R = CF3, L3: R = C(CH3)3; hfa = hexafluoroacetylacetonate, were synthesized. Crystal structures were determined by single crystal X-ray analysis. Volatility and thermal stability of the obtained compounds were studied by thermal gravimetric analysis, vacuum sublimation and by mass transfer in helium flow. It was established that all the obtained heterometallic complexes are volatile and can be sublimed in vacuum without dissociation into monometallic complexes. Compounds 3–6 were examined as SSP (single source precursors) in conventional low pressure MOCVD (Metalorganic Chemical Vapor Deposition) of inorganic films on Si(1 0 0) substrates. Influence of precursor composition on their structure and thermal properties as well as on the composition of the deposited inorganic films are discussed. © 2020 Elsevier Ltd

Krisyuk V.V. , Ursym kyzy S. , Rybalova T.V. , Korolkov I.V. , Sysoev S.V. , Koretskaya T.P. , Kuchumov B.M. , Turgambaeva A.E.
Volatile trinuclear heterometallic beta-diketonates: Structure and thermal properties related to the chemical vapor deposition of composite thin films
Polyhedron. 2020. V.191. 114806 . DOI: 10.1016/j.poly.2020.114806 WOS Scopus РИНЦ

Опубликована в печати:

1 нояб. 2020 г.

Web of science	WOS:000583325200011
Scopus	2-s2.0-85092004063
РИНЦ	45252833
OpenAlex	W3088354981